Solid Immersion Lens Microscope for Spectroscopy of Nanostructure Materials
نویسندگان
چکیده
منابع مشابه
Subwavelength-size solid immersion lens.
We report on the fabrication and characterization of nanoscale solid immersion lenses (nano-SILs) with sizes down to a subwavelength range. Submicrometer-scale cylinders fabricated by electron-beam lithography are thermally reflowed to form a spherical shape. Subsequent soft lithography leads to nano-SILs on transparent substrates for optical characterization. The optical characterization is pe...
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We present a scanning near-field infrared microscopy technique using transient solid immersion lenses as near-field probes. The transient SILs were formed by photoinducing a zone plate structure on the surfaces of semiconductor wafers with high indices of refraction. Lenses with different number of zones have been tested using gallium phosphide and silicon wafers and their focusing properties w...
متن کاملAdvanced optical characterization of micro solid immersion lens
We report on the advanced optical characterizations of microfabricated solid immersion lenses with 2-μm diameter, operating at λ = 642 nm. The main feature, the spot size reduction, has been investigated by applying a focused Gaussian beam of NA = 0.9. Particular illuminating beams, e.g., Bessel-Gauss beams of the zeroth and the first order, a doughnutshape beam and its decompositions, i.e. two...
متن کاملNear-field infrared imaging with a microfabricated solid immersion lens
We report imaging in the infrared with a microfabricated solid immersion lens. The integrated 15-mm-diameter lens and cantilever are fabricated from single-crystal silicon and scanned in contact with a sample to obtain an image. We demonstrate a focused spot size of l/5 and an effective numerical aperture of 2.5 with l59.3 mm light. The total power transmitted through the lens is a factor of 10...
متن کاملAberration compensation in aplanatic solid immersion lens microscopy.
The imaging quality of an aplanatic SIL microscope is shown to be significantly degraded by aberrations, especially when the samples have thicknesses that are more than a few micrometers thicker or thinner than the design thickness. Aberration due to the sample thickness error is modeled and compared with measurements obtained in a high numerical aperture (NA ~3.5) microscope. A technique to re...
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ژورنال
عنوان ژورنال: Journal of the Optical Society of Korea
سال: 2011
ISSN: 1226-4776
DOI: 10.3807/josk.2011.15.1.078